(1) Process gas control equipment
A: Gas supply equipment GC for toxic and explosive gases such as silane
Hisptech type fully automatic special gas cabinet is used for toxic, corrosive, and explosive gases, with fully automatic touch screen operation (with external blowing, vacuuming, automatic emergency remote cut-off, accident alarm, high-pressure pressure maintaining steel cylinder joint leakage detection, leakage alarm docking, ventilation outlet, etc.)
B: Control rack for inert gas cylinders such as ordinary nitrogen
Hisptech type dual bottle gas automatic switching gas control equipment, with pressure alarm, leakage alarm docking, overpressure protection, remote control, remote cut-off, remote EMO emergency shutdown
C: Terminal gas control equipment
Hisptech type VMB (silane, nitrogen) with two in and four out, equipped with automatic emergency remote cut-off, vacuum pumping, external blowing, leak alarm docking, ventilation outlet, etc
(2) Gas pipeline transportation system
The pipeline needs to be safely arranged according to the current situation of the entire building and the comprehensive situation of clean room construction and decoration, and scientifically distributed to the designated equipment in the clean room according to the actual needs of the corresponding process equipment. The layout of pipelines must use safe and necessary double-layer sleeves (the inner layer tube is a clean polished EP grade tube, the middle tube is vacuum sealed, and the outer layer is a BA grade tube) with vacuum pumping and vacuum monitoring in the middle. All pipes and valve components must use internationally renowned EP grade materials
(3) GMS Gas Management System
Gas detection alarm. Multiple internationally renowned brand leak detectors are used in the gas room and on-site for multi-point detection. Each detector is divided into two levels of alarm, and the alarm signal is triggered simultaneously with the BMS in the local area. When the leakage reaches the second level concentration, the alarm lights of the local and BMS are triggered, and the corresponding equipment is triggered to shut down and stop the gas supply. And it is linked with the cleanroom control system to open/close relevant access controls, output corresponding broadcasts, and evacuate personnel
