Front end 0.1 μ filter, back-end 0.001 μ terminal filter
Adapt to gases
Explosive gases: such as hydrogen (H2), nitric oxide (N2O), methane (CH4), acetylene (C2H2), etc
Toxic and corrosive gases: such as sulfur dioxide (SO2), hydrogen sulfide (H2S), carbon monoxide (CO), nitrogen dioxide (NO2), hydrogen chloride (HCL), et
Application industry
Applied to supporting equipment such as MOCVD, PECVD, etching machines, etc., suitable for university laboratories, material analysis laboratories, chip semiconductors, photovoltaic solar cells, biomedical engineering, microelectronics new materials and other industries.