Centralized gas supply system in universities-新材料-特气柜_特气设备

Customer background

Customer Demand

Solution

Project results

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Customer background

The client of this project is a key university in China. The laboratory uses a vapor deposition system, which involves hazardous gases such as silane, ammonia, high-purity nitrogen, and dichlorosilane. The laboratory needs to develop a special gas centralized supply system to provide stable, high-pressure, and high-purity experimental gases for the laboratory personnel

Customer Demand

Research teachers are more concerned about safety and have put forward requirements such as explosion prevention and anti-static

After the second decompression, it is also necessary to maintain a continuous and stable high-pressure state, and the pressure can be precisely adjusted within a certain range

Gas needs uninterrupted supply

The generated exhaust gas is discharged separately to the designated area

Solution

(1) Centralized gas supply is a customized project consisting of various functional modules in a gas supply system. Based on the characteristics of this project, it provides users with five major components: high-pressure gas control storage equipment, pipeline and low-pressure control parts, exhaust system, life safety system, equipment grounding and anti-static system

(2) Renovate the experimental room to ensure the safety of the experimental environment

(3) Customized explosive hydrogen control equipment can stably and accurately control gas pressure, etc., to meet customer usage parameters

Project results