The Chemical Supply System, abbreviated as CDS, is a system that provides 24-hour uninterrupted supply of high-purity chemicals for production lines. It is generally used for chemicals with large usage, multiple POU points, or high risk. Its purpose is to supply high-purity chemicals for cleaning impurities and particles on the surface of chips, etching chip patterns, developing chip patterns, grinding chips, etc
The main chemicals used in the semiconductor industry can be roughly divided into acid, base, solvent, oxidizer, and slurry. Semiconductor manufacturing is largely a chemical process, with up to 20% of the process steps being cleaning and surface treatment of the wafer.
The filling unit of the tanker truck transports the original chemical solution of the tanker truck to the supply machine for storage in the tank
Storage Tank
Material: Depending on the nature of the supplied chemicals, storage tanks often use different materials.
Acid and alkali chemicals: Tank CS/SUS304, lined with PTFE
Organic solvent chemicals: tank SUS316L-BA/EP
Corrosive solvent chemicals: Tank CS/SUS304, lined with PTF
The chemical supply unit is used to supply chemicals from 200L Drum drums or Storage Tanks to VMB through internal pumps and filters.
According to the different properties of the supplied chemicals, the materials are divided into:
Acid and alkali chemicals: PP shell, PFA internal valve and pipeline
Organic solvent chemicals: SUS shell, SUS internal pipeline valve components
Corrosive solvent chemicals: shell SUS, internal pipeline valve PFA
VMB (valve manifold box)
Valve diversion box, used to connect the main pipeline to VMB and then connect it to the corresponding POU through branch valves.
Material: Divided according to the properties of the supplied chemicals
Acid and alkali chemicals: PP shell, PFA internal valve and pipeline
Organic solvent chemicals: SUS shell, SUS internal pipeline valve components
Corrosive solvent chemicals: shell SUS, internal pipeline valve PFA
T-BOX: Used to supply multiple VMBs that need to be connected to the main pipeline. When a branch is opened on the main pipeline, T-BOX needs to be installed.
E-BOX: Used to install E-BOX at the end of the main pipeline when a reserved point is needed.
Material: Divided according to the properties of the supplied chemicals:
Acid and alkali chemicals: PP shell, PFA internal valve and pipeline
Organic solvent chemicals: SUS shell, SUS internal pipeline valve components
Corrosive solvent chemicals: shell SUS, internal pipeline valve PFA
Phone
Wechat： G4009009093
Address:Gais Park Technology Building, Songbai Road, Bao'an, Shenzhen
Southwest Branch: Global Center, High tech Zone, Chengdu, Sichuan Province
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East China Branch: 750 Linyuan Street, Zhujing Town, Jinshan District, Shanghai
