Plasma exhaust gas treatment cabinet (Scrubber)-废气处理柜（Scrubber)-特气柜_特气设备

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Plasma exhaust gas treatment cabinet (Scrubber)

Dimensions: Dimensions approximately 1000 * 900 * 2060 (W * D * H)
Inlet: Inlet ports 1-4, inlet module component temperature monitoring (120 ℃ ↓)
Wet washing: anti-corrosion project (high resin coating room), flow supply monitoring in Switch mode, wet washing temperature monitoring (below 35 ℃)
Wet storage tank: high resin coated chamber, circulating water with sufficient capacity, water pump
Plasma chamber (reactor): top-down flow system, indoor temperature sensor, anti-corrosion project (inner cavity SUS310)
By using a heating module, equipped with high and low temperature alarm functions, and equipped with sufficient air (air needs to be provided by the user on site) for combustion assistance, including a tail gas processor to dilute the amount of combustion assisting gas. The tail gas processing capacity is ≥ 1500 liters per minute, which can burn, oxidize, and decompose combustible or decomposable exhaust gas to achieve the purpose of reducing harm. This equipment can process combustible/explosive gases with a processing capacity of ≥ 220SLM, such as hydrogen, acetylene, phosphine, carbon monoxide, difluoromethane, methyl fluoride, etc. The Dimension size is about 1000 * 900 * 2060 (W * D * H)

Adapt to gases

Explosive and toxic gases: such as fluorine gas (F2), arsenic (AS), greenhouse gases (GHG), etc

Application industry

Suitable for enterprises or laboratories in the fields of semiconductors, new materials, higher education institutions, research institutes, aerospace, and microelectronics that require the treatment of explosive and toxic gases

APPLICATION INDUSTRY