Adsorption scrubber-废气处理柜（Scrubber)-特气柜_特气设备

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Adsorption scrubber

Adsorption principle: Adsorption scrubber is a tail gas treatment technology based on physical adsorption and chemical reactions. The main principle is to adsorb pollutants in exhaust gas through adsorbents, and then convert them into harmless substances through chemical reactions, ultimately achieving the goal of purifying exhaust gas.
Selection of adsorbents: Adsorbents in adsorption scrubbers are usually selected from materials with high adsorption capacity and good stability, such as activated carbon, molecular sieves, etc. The selection of adsorbent should be determined based on the type and concentration of pollutants in the exhaust gas to ensure efficient adsorption and conversion effects.
Adsorption process: The adsorption process of an adsorption scrubber is mainly divided into two stages: physical adsorption and chemical adsorption. Physical adsorption refers to the physical adsorption of pollutants on the surface of an adsorbent, mainly relying on the pore structure and surface chemical properties of the adsorbent. Chemical adsorption refers to the chemical reaction between pollutants and adsorbents, which converts pollutants into harmless substances through chemical reactions.

Applicable gas

The adsorption type local scrubber exhaust gas treatment equipment can treat gas types including special gases used in etching processes and chemical vapor deposition processes in industries such as semiconductors, liquid crystals, and solar energy, mainly including SiH4、SiH2Cl2、PH3、B2H6、TEOS、H2、CO、NF3、SF6、C2F6、WF6、NH3、N2O class

Application industry

Suitable for enterprises or laboratories in the fields of semiconductors, new materials, higher education institutions, research institutes, aerospace, and microelectronics that require the treatment of explosive and toxic gases

APPLICATION INDUSTRY