Semiconductor gas path system-泛半导体-特气柜_特气设备

Customer background

Customer Demand

Solution

Project results

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Customer background

The client of this project is a semiconductor company in Shandong. The dry etching equipment used in the experiment involves eight gases including sulfur hexafluoride, chlorine gas, silane, hydrogen gas, helium gas, etc. Provide a stable, high-purity, and safe experimental environment for laboratory personnel

Customer Demand

There is no suitable location for a gas cylinder room in the laboratory

The pressure end gas equipment hopes to dynamically adjust the pressure and flow rate

Gas usage requires low pressure and high pressure, and the size of the steel cylinders used varies

It is required to achieve human-machine separation and direct emission of exhaust gas without causing environmental problems

Solution

(1) Provide explosive mobile gas rooms with intelligent control, enabling on-site and remote quotation and centralized control

(2) Provide Hisptech type specialized fully automatic gas control cabinet for toxic, corrosive, and explosive products, with automatic switching, secondary pressure regulation, and three-stage pressure regulation to reduce the pressure difference on both sides of the pressure regulating valve and ensure its service life. Configure professionally developed software to achieve intelligent operation of human-machine separation

(3) Provide Hisptech electric thermal decomposition+polymer WET scrubber, using ultra-high temperature jacket decomposition and ultra-high pressure water molecule adsorption treatment methods, with a treatment efficiency of ≥ 99.999%

Project results